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マイクロプラズマの微細放電分析
○MARIUS BLAJAN・KAZUO SHIMIZU(静岡大学)
Emission spectra of microplasma were measured by an ICCD camera and a spectrometer to which was attached a fiber optic. Photos of microdischarges were taken using a microscope and a digital camera. The light emission from microdischarges in various discharge gaps shown a wider area towards the negative electrode and a smaller and more intense area towards the grounded or the positive one. Streamer diameter was observed about 10 µm, and was thinner than previously reported and decreased with the discharge gap. Microplasma is an atmospheric glow discharge, its characteristics showed negative glow, positive column and Faraday dark space.