Currently, multi-probe array devices have been studied actively for data storage and nano lithography. However, to make them practical, we have to elucidate three factors “ electrical contact, wear resistance, frictional force” in nanoscale. In this study, I aim to clarify the effect of friction and wear resistance. The way is observing the contacted RuO2 tips using the technique of MEMS-in-TEM in real time. In this article, I use the Ru for comparison of ruthenium dioxide. I succeeded to bring Ru tips into contact in nanoscale and observe it in real time during a tensile test. I calculated the friction force of Ru.